Research Facilities:

• Agnitron Agilis Metal-organic Chemical Vapor Epitaxy (MOVPE) for growth of Gallium (Aluminum) Oxide thin films and heterostructures housed at the Utah Nanofab
  • Vertical quartz tube reactor with a far injection showerhead (2 inch wafer capability)
• Home-built Low Pressure Chemical Vapor Deposition System (LPCVD)
• On-campus shared material characterization (XRD, AFM, SEM, TEM, XPS/UPS, UV-Vis, Ellipsometry)
  • Surface Science Lab (Utah Nanofab)
  • Material Characterization Lab
• On-campus shared micro/nanofabrication facilities
  • Utah Nanofab cleanroom
• Electrical characterization labs (Labs of Prof.Michael A. Scarpulla and Prof. Berardi Sensale Rodriguez)
  • Probe station (High voltage capability being added) with Keithley 4200 SCS
  • Cryogenic probe station/DLTS
  • RF Probe Station & VNA